Growth method for silicon nanowires and nanoparticle chains from silicon monoxide
US6313015A · kind A · utility
95Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 1999 |
| Grant date | Nov 6, 2001 |
| Priority date | — |
| Expiry date | Jun 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/891
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Silicon nanowires and silicon nanoparticle chains are formed by the activation of silicon monoxide in the vapor phase. The silicon monoxide source may be solid or gaseous, and the activation may be by thermal excitation, laser ablation, plasma or magnetron sputtering. The present invention produces large amounts of silicon nanowires without requiring the use of any catalysts that may cause contamination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.