Patent · US Expired

Semiconductor device and method for manufacturing the same

US6313532A · kind A · utility

49Cited by
5References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 20, 1999
Grant dateNov 6, 2001
Priority date
Expiry dateSep 20, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/351
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A low elasticity layer (20) having an opening in an electrode arranging area where element electrodes are disposed is provided on a main surface of a semiconductor substrate (10). On the low elasticity layer (20), lands (32) serving as external electrodes are disposed, and pads (30) on the element electrodes, the lands (32) and metal wires (31) for connecting them are integrally formed as a metal wiring pattern (33). A solder resist film (50) having an opening for exposing a part of each land (32) is formed, and a metal ball (40) is provided on the land (32) in the opening. The low elasticity layer (20) absorbs thermal stress and the like caused in heating or cooling the semiconductor device, so as to prevent disconnection of the metal wires (31).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.