Resonant frequency tracking system and method for use in a radio frequency (RF) power supply
US6316756A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2000 |
| Grant date | Nov 13, 2001 |
| Priority date | — |
| Expiry date | Jan 31, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/06
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A radio frequency (RF) power system for providing RF power to a load. The RF power system comprises a tank circuit; a direct current (DC) voltage source that provides a DC voltage within a first predetermined range; an amplifier, coupled to said DC voltage source, to provide an alternating voltage to said tank circuit; a frequency controller, coupled to said amplifier, to control a frequency of said alternating voltage provided by said amplifier; and a power sensor being coupled to said tank circuit for providing a signal to said frequency controller, wherein said frequency controller controls said frequency of said alternating voltage based on said signal provided from said power sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.