Sensor and method of use
US6318174A · kind A · utility
14Cited by
10References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2000 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Mar 30, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor has an electrode (120) that is movable along three mutually perpendicular axes (10, 11, 12). The sensor also has stationary over-travel limiting structures that restrict the movement of the electrode (120) along the three axes (10, 11, 12).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.