Optical mirror system with multi-axis rotational control
US6318871A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 9, 2000 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Jun 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical mirror system in accordance with the present invention is disclosed. The optical mirror system comprises a mirror frame and an optical surface coupled to the mirror frame. The mirror system further includes an electrostatic shield coupled to optical surface and the mirror frame and an electrode system for causing the optical surface to be rotated without being deformed. In operation, primary and secondary electrodes are utilized. Differential capacitive sensing may be used to reduce the noise in the sense signal. The mirror can be fabricated using standard surface-micromachining processes, and aside from one-time assembly operations, the device has no frictional wear.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.