Thin-film fabrication method and apparatus
US6319321A · kind A · utility
52Cited by
12References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 20, 1998 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Jan 20, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2011/00
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A thin-film fabrication method includes a spray step in which at least one thin-film composition material in liquid form is sprayed into a vacuum vessel via a spray nozzle provided for each thin-film composition material and deposited on a substrate, and a heat treatment step in which the material deposited on the substrate is heat treated. The substrate temperature in the spray step and/or the heat treatment step is controlled within a prescribed temperature range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.