Ignition means for a cathodic arc source
US6319369A · kind A · utility
14Cited by
16References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 1999 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Nov 5, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A coating of positive ions is applied to a substrate by generating an arc at a cathode, directing a beam of ions emitted from the cathode to the substrate via a filter path to remove macroparticles, igniting the arc by moving an arc ignition from a retracted position to an ignition position in which cathode contact is made, and storing the position in which arc ignition occurred.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.