Patent · US Expired

Stripping method

US6319835A · kind A · utility

28Cited by
6References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 25, 2000
Grant dateNov 20, 2001
Priority date—
Expiry dateFeb 25, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/426
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Disclosed are compositions useful for removing antireflective compositions from a substrate. Also disclosed are methods of removing antireflective compositions from a substrate using such compositions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.