Portable high resolution scanning electron microscope column using permanent magnet electron lenses
US6320194A · kind A · utility
14Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2000 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | May 2, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/16
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.