Diamond or diamond like carbon coated chemical sensors and a method of making same
US6320295A · kind A · utility
26Cited by
4References
9Claims
0Family size
Inventors
Key dates
| Filing date | Nov 18, 1998 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Nov 18, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A water vapor insensitive and corrosion resistant chemical or biochemical sensor device, including a transducer, coated with a protective coating of diamond or a diamond-like carbon, preferably by a pulsed laser deposition technique. The surface of the protective coating is coated with a chemoselective or bioselective absorption material or film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.