Patent · US Expired

System and method for performing bulge testing of films, coatings and/or layers

US6321594A · kind A · utility

8Cited by
10References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 20, 2000
Grant dateNov 27, 2001
Priority date
Expiry dateMar 20, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2203/0641
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A system and corresponding method for bulge testing films (e.g. thin films, coatings, layers, etc.) is provided, as well as membrane structures for use in bulge testing and improved methods of manufacturing same so that resulting membrane structures have substantially identical known geometric and responsive characteristics. Arrayed membrane structures, and corresponding methods, are provided in certain embodiments which enable bulge testing of a film(s) over a relatively large surface area via a plurality of different freestanding membrane portions. Improved measurements of film bulging or deflection are obtained by measuring deflection of a center point of a film, relative to non-deflected peripheral points on the film being tested. Furthermore, membrane structures are adhered to mounting structure in an improved manner, and opaque coatings may be applied over top of film(s) to be bulge tested so that a corresponding optical transducer can more easily detect film deflection/bulging. In certain embodiments, a laser triangulation transducer is utilized to measure film deflection/bulging.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.