Patent · US Expired

Method of manufacturing liquid crystal display

US6323051A · kind A · utility

77Cited by
8References
15Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 7, 2000
Grant dateNov 27, 2001
Priority date
Expiry dateMar 7, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/60
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A manufacturing method of a liquid crystal display of the present invention is a manufacturing method of a liquid crystal display having a glass substrate provided thereon with a matrix of thin film transistors, each having a semiconductor film pattern formed by photo-etching a high-resistance semiconductor film and a low-resistance semiconductor film, and a third metal film serving as a source metal film layer layered on the semiconductor film pattern, in which the semiconductor film pattern is formed on the glass substrate first, and thence the third metal film is layered on the glass substrate. Consequently, a liquid crystal display can be manufactured with a fewer number of manufacturing steps while at the same time the manufacturing costs can be saved by preventing a decrease in the yield caused by film separation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.