Laser processing of a thin film
US6324195A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 4, 1999 |
| Grant date | Nov 27, 2001 |
| Priority date | — |
| Expiry date | Jun 4, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/52
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Method and apparatus for processing a workpiece having a thin film layer using laser pulses generated by a plurality of lasers. The lasers are equipped with Q-switches and triggered by a Q-switch trigger device at controlled pulse frequencies and delays with respect to one another. The laser pulses from the plurality of lasers are directed to the same processing spot on the workpiece to generate a combined laser beam, and the workpiece is moved relative to the laser beam to process the thin film with the laser pulses. The method and apparatus increase the processing speed and accomplish multiple-step processing in a single pass. Application of the invention in the fabrication of thin film solar cells is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.