X-ray irradiation apparatus and x-ray exposure apparatus
US6324255A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1999 |
| Grant date | Nov 27, 2001 |
| Priority date | — |
| Expiry date | Aug 12, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7085
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An x-ray irradiation apparatus and x-ray exposure apparatus provide improved x-ray generation. The x-ray irradiation apparatus includes a target material feed-out device to provide a target material in a feed-out direction to a specified target position and a laser to provide laser light to the specified target position to cause the target material to emit x-rays. In some configurations, an x-ray generation position control device may be used to determine and control a position of x-ray generation, a rotary mechanism may be operatively connected to the target material feed-out device to axially rotate the target material feed-out device about the feed-out direction, and/or a target feed-out control device may be used to detect and control the position of the target material feed-out device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.