Multi-gas analysis system for analyzing high-purity gases
US6324892A · kind A · utility
7Cited by
1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 1999 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | Dec 7, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There are provided an apparatus for analyzing gases and a gas analyzing method which can securely detect presence and absence of leakage in a short time and which can carry out analyses successively, safely and accurately in a stable state. The apparatus for analyzing gases is provided with sample gas introducing systems (1 to 5) for introducing a plurality of sample gases selectively, and analyzers (6, 10 and 14), and also has means (9) for monitoring, when a sample gas under determination is changed over to another sample gas, change in the concentration of the sample gas component introduced before the change over.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.