Pressure sensor support base with cavity
US6324914A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1999 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | Jul 15, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure sensor capsule having a support base with a cavity is provided. The capsule includes a housing having a ceramic cover sealingly attached to a ceramic base to define an interior chamber. The base has a cavity facing this interior chamber and at least one hole adjacent the cavity that extends through the base. A glass sensor has a first diaphragm with a first electrode and a second diaphragm with a second electrode bonded together to form a capacitor and is mounted in the chamber so that one of the diaphragms is received within the cavity and the other diaphragm lies on the surface of the base and covers the hole. A conducting member extends from the sensor, through the hole to electronic circuitry mounted to the capsule. The cavity also has a land for supporting the diaphragm disposed therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.