Apparatus for precise molding and alignment of structures on a substrate using a stretchable mold
US6325610A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2001 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | Feb 8, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2217/49
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An apparatus for molding and aligning microstructures on a patterned substrate using a microstructured mold. A slurry containing a mixture of a ceramic powder and a curable fugitive binder is placed between the microstructure of a stretchable mold and a patterned substrate. The mold can be stretched to align the microstructure of the mold with a predetermined portion of the patterned substrate. The slurry is hardened between the mold and the substrate. The mold is then removed to leave microstructures adhered to the substrate and aligned with the pattern of the substrate. The microstructures can be thermally heated to remove the binder and optimally fired to sinter the ceramic powder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.