Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby
US6325886A · kind A · utility
33Cited by
7References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2000 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | Feb 14, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A method of attaching a micromechanical fluid control device to a substrate includes the steps of forming a first ring of a first adhesive around an aperture defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.