Sensor and method of fabrication
US6326228A · kind A · utility
27Cited by
12References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 1998 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | May 29, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0014
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor (10) includes a cavity (31) formed by a substrate (11), an adhesive (21), and a filter (22). A sensing element (14) is located inside the cavity (31) while electrical contacts (17, 18) coupled to the sensing element (14) are located outside the cavity (31). The filter (22) protects the sensing element (14) from physical damage and contamination during die singulation and other assembly processes. The filter (22) also improves the chemical sensitivity, selectivity, response times, and refresh times of the sensing element (14).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.