Patent · US Expired

Integrated multiple sensor package

US6326611A · kind A · utility

10Cited by
1References
34Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 28, 1999
Grant dateDec 4, 2001
Priority date
Expiry dateSep 28, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/48091

Abstract

An integrated dual sensor package comprises a housing, a first sensor assembly and a second sensor assembly. The housing includes an internal vacuum chamber, a first window and a second window. The first window is transparent to a first wavelength of propagating energy and the second window is transparent to a second wavelength of propagating energy. The first sensor assembly and the second sensor assembly each have an active region responsive to a respective one of the first wavelength and second wavelength of propagating energy. The first sensor assembly and the second sensor assembly are each mounted within the vacuum chamber with the active region of each of the first sensor assembly and the second sensor assembly adjacently aligned with a respective one of said first window and said second window. The common alignment structure also serves as a common thermal interface to the external environment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.