Method and device for opto-electrical acquisition of shapes by axial illumination
US6327041A · kind A · utility
17Cited by
13References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 27, 2000 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | Nov 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a device for opto-electrically acquiring the shape of a surface by illuminating the surface (S) with light beams (10) having different wavelengths and which converge at different points on the axial illumination direction (Y) in the vicinity of the surface (S), by spectral analysis of the light reflected or backscattered by the surface (S) in the direction (Y) and by determining distances of points on the surface (S) relative to a reference plane (X, Y) from the wavelength and/or the spectral widths of the light analyzed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.