Vapor drying system and method
US6328809A · kind A · utility
17Cited by
80References
74Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 8, 1999 |
| Grant date | Dec 11, 2001 |
| Priority date | — |
| Expiry date | Jan 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present apparatus is a method and system for treating and drying the surface of an object. According to the described method, with a wet object positioned in a vessel, a drying vapor is introduced into the vessel. The drying vapor condenses on the surface of the object and reduces the surface tension of the residual process fluid, causing the residual process fluid to flow off of the surface. In one embodiment, wet processing of the object and a subsequent evacuation of process fluid is carried out in the vessel prior to introduction of the drying vapor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.