Antireflection or light-absorbing coating composition and polymer therefor
US6329117A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 1999 |
| Grant date | Dec 11, 2001 |
| Priority date | — |
| Expiry date | Aug 9, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/111
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A composition for an anti-reflective coating or a light absorbing coating, which shows good light absorption for lights of 100-450 nm in wavelength, suffers neither footing nor intermixing, and has excellent storage stability and step coverage, and novel copolymers to be used therein. The novel polymers comprise acrylic or methacrylic copolymers or terpolymers, at least having both recurring units (1) wherein an amino group- or hydroxyl-group containing organic chromophore capable of absorbing lights of 100 to 450 nm in wavelength is chemically bound to the carbonyl group bound to a carbon atom in the main chain, directly or through --R.sub.1 NHCXY-- (wherein R.sub.1 represents an alkylene group, X represents O or S, Y represents O or NR.sub.6, R.sub.6 represents H, a substituted or non-substituted, straight chain or cyclic alkyl group or a phenylene group) and for example recurring units (2) wherein a double bond-or epoxy group-containing alkyl group is chemically bound to the carboxyl or oxygen group bound to a carbon atom in the main chain. The composition containing the copolymer is coated on a wafer to form a bottom anti-reflective coating and, after coating thereon a photores…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.