Method for producing devices having piezoelectric films
US6329305A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2000 |
| Grant date | Dec 11, 2001 |
| Priority date | — |
| Expiry date | Feb 11, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/964
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for achieving improved piezoelectric films for use in a resonator device is disclosed. The method is based on applicant's recognition that the texture of a piezoelectric film (e.g., as used in a piezoelectric resonator) is directly affected by the surface morphology of the underlying electrode, and additionally, the surface morphology of the electrode is affected by the surface morphology of the underlying oxide layer or Bragg stack. Accordingly, the invention comprises a method of making a device having a piezoelectric film and electrode comprising controlling the deposition and surface roughness of the electrode and optionally, the Bragg stack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.