Mm-wave/IR monolithically integrated focal plane array
US6329649A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 1999 |
| Grant date | Dec 11, 2001 |
| Priority date | — |
| Expiry date | Oct 7, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01Q21/24
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
An integrated infrared and millimeter-wave monolithic focal plane sensor array having a substrate upon which an integrated array of infrared sensors and mm-wave sensors are provided at a first planar level on the same side of the substrate, and a planar antenna for receiving incident millimeter-wave radiation located at a second planar level located between the integrated array of sensors and the surface of the substrates for coupling the mm-wave radiation field to the mm-wave sensor. The antenna receiver of electromagnetic radiation, in one embodiment, is an antenna having a crossed bowtie configuration which efficiently couples the radiation field to the mm-wave sensor. The invention also is directed to a method of fabricating such a radiation sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.