Optical translation measurement
US6330057A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1999 |
| Grant date | Dec 11, 2001 |
| Priority date | — |
| Expiry date | Mar 8, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2203/0338
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining the relative motion of a surface with respect to a measurement device comprising: PA1 illuminating the surface from a source with incident illumination, such that illumination is reflected from portions of the surface toward a detector; PA1 spatially filtering the reflected illumination such that the phase of the detected optical illumination from a given scatterer on the surface is substantially constant or linearly related to the translation of the surface; PA1 generating a signal by the detector responsive to the illumination incident on the detector; and PA1 determining the relative motion of the surface from the signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.