Modulator and method for manufacturing of such a modulator
US6332048A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 14, 1999 |
| Grant date | Dec 18, 2001 |
| Priority date | — |
| Expiry date | Oct 14, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0157
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Electro-absorption modulator (EAM), of the kind that includes a waveguide, for modulation of light, comprising a waveguide core, a waveguide cladding (42, 43, 52, 53), and an electrode (45, 55), the modulator being arranged to modulate light launched into the modulator as a response to a voltage being applied on the electrode. According to the invention, the width and/or the thickness of the waveguide core (41, 51) are/is varying along the length of the modulator. The width/thickness is smaller in the portion of the modulator where the light is intended to be input, for the purpose of reducing the absorption of the modulator there. A method in manufacturing of the modulator may utilize a tapered photolithography mask (46).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.