Vacuum chamber for flat substrates

US6332525A · kind A · utility

Assignee

• Leybold Systems GmbH · DE

Inventors

• Thomas Gebele · Neuses, DE
• Gert Rodling · Obertshausen, DE

Key dates

• Filing date: Apr 14, 2000
• Grant date: Dec 25, 2001
• Expiry date: Apr 14, 2020

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C17/002
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.