Polishing apparatus with transfer arm for moving polished object without drying it
US6332835A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1998 |
| Grant date | Dec 25, 2001 |
| Priority date | — |
| Expiry date | Nov 18, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49165
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A polishing apparatus that can effectively and efficiently remove potassium and other alkaline metals comprises integrally a polishing unit for polishing an object by means of a polishing agent and a cleaning unit for cleaning the polished object. The polishing unit and the cleaning unit have means for isolating the internal atmosphere from the external atmosphere and the cleaning unit has a means for cleaning the polished object by bringing hot pure water or steam of pure water into contact with the polished object. With a cleaning method hot pure water is brought into contact with the polished object without drying it after having been polished by such a polishing apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.