Thin-film magnetic recording head manufacture using selective imaging
US6332962A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1998 |
| Grant date | Dec 25, 2001 |
| Priority date | — |
| Expiry date | Apr 30, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30438
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A focused particle beam system, according to one embodiment of the invention, precisely shapes a pole-tip assembly formed by a multi-layer device having a first layer with a first structural element, a second layer with a second structural element, and a shielding layer with a shielding element, the shielding element being located between the first layer and the second layer. The focused particle beam system mills the second structural element without irradiating a first structural element. The system images a selected portion of the multi-layer device to locate the shielding element and thereby avoids irradiating the first structural element. The shielding element separates the first structural element from the second structural element. Based on the location of the shielding element, the system images and mills the second structural element without irradiating the first structural element. In this manner, the focused particle beam system mills the second structural element to produce a desired pole-tip configuration. By producing a desired pole-tip configuration, these methods and apparatus produce a recording transducer capable of high storage density.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.