Patent · US Expired

Standard for calibrating and checking a surface inspection device and method for the production thereof

US6333785A · kind A · utility

2Cited by

4References

5Claims

0Family size

Assignee

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG · DE

Inventors

Rudiger Schmolke · Burghausen, DE
Dieter Graf · Burghausen, DE
Robert Kerschreiter · Haag in Oberbayern, DE
Hans Gerber · Burghausen, DE
Anton Luger · Österreich, AT
Monique Suhren · Portland, US

Key dates

Filing date	Nov 12, 1999
Grant date	Dec 25, 2001
Priority date	—
Expiry date	Nov 12, 2019

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/93
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.