Vacuum arc evaporation source and vacuum arc vapor deposition apparatus
US6334405B1 · kind B1 · utility
10Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2000 |
| Grant date | Jan 1, 2002 |
| Priority date | — |
| Expiry date | Jan 10, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
To provide an evaporation source and an arc evaporation apparatus in which an evaporation material as a cathode of arc discharge, and a magnetic field generating source arranged so that all lines of magnetic force crossing the evaporation surface of the evaporation material cross substantially vertically are arranged whereby the number of molten particles arriving at a substrate by the magnetic field can be reduced, and deviation of occurrence of arc spots can be suppressed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.