Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train
US6340806B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2000 |
| Grant date | Jan 22, 2002 |
| Priority date | — |
| Expiry date | Jun 1, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/08
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser having a first wavelength for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a fiber amplifier subsystem for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.