Microwave plasma generator and system for decomposing organic halide
US6340863B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2000 |
| Grant date | Jan 22, 2002 |
| Priority date | — |
| Expiry date | Jun 23, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/151
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A discharge tube (11) made of a dielectric material extends through a hole (3) of a rectangular waveguide (1) and through a coaxial microwave cavity (4) so as to be coaxial with the central axis of the cavity (4). This discharge tube (11) has a double-tube structure including an outer tube (12) and an inner tube (13). The sectional area of an annular gap formed between the outer tube (12) and the inner tube (13) is held constant over the entire length of the inner tube (13). This allows the generation of a stable thermal plasma when a reaction gas containing an organic halide and water vapor is supplied into the outer tube through the annular gap with a microwave transmitted from the rectangular waveguide (1) into the cavity (4).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.