Electrostatic inkjet head having an accurate gap between an electrode and a diaphragm and manufacturing method thereof
US6341847B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 1999 |
| Grant date | Jan 29, 2002 |
| Priority date | — |
| Expiry date | Sep 22, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electrostatic inkjet head has an accurately controlled, uniform gap between a diaphragm and an electrode. The gap between the electrode and the diaphragm is defined by a depth of a depression formed in the diaphragm substrate or the electrode substrate. The depression is formed by removing an oxidation layer which is formed by selectively oxidizing a portion of the diaphragm substrate or the electrode substrate. The depth of the depression is determined by a thickness of a portion of the oxidation layer, which portion extends from a surface of the diaphragm substrate or the electrode surface. Since the thickness of the oxidation layer is accurately controlled, the depth of the depression is also accurately controlled. Accordingly, a dimension of the gap between the diaphragm and the electrode is extremely accurate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.