Method of drying resinous composition layer, method of manufacturing color filter substrate using the same drying method, and liquid crystal display device
US6342321B1 · kind B1 · utility
9Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1999 |
| Grant date | Jan 29, 2002 |
| Priority date | — |
| Expiry date | Dec 21, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/168
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of drying a resinous composition layer, comprises the steps of coating a resinous composition over a substrate and drying the resinous composition layer to be dried. The drying method is a vacuum dry. And a drying condition in that case is such that an exhaustion is performed taking over 6 sec. till a degree of vacuum comes to 100 Torr.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.