Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this process
US6342970B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 28, 1997 |
| Grant date | Jan 29, 2002 |
| Priority date | — |
| Expiry date | Jan 28, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.