System and method of operation of a digital mass flow controller
US6343617B1 · kind B1 · utility
59Cited by
12References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 9, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Jul 9, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.