Computer controlled temperature and oxygen maintenance for fiber coating CVD
US6344232B1 · kind B1 · utility
464Cited by
8References
1Claims
0Family size
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Key dates
| Filing date | Jul 29, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Jul 29, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/545
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Computer controlled fiber coating chemical vapor deposition system and method for generating substantially uniform coated fibers by maintaining chemical vapor deposition reactor temperature in real time. Reactor temperature is monitored by in situ temperature sensors. Reactor temperature is sensitive to oxygen levels and oxygen levels within the reactor are varied in response to temperature sensor data. Closed loop process control software maintains reactor temperature at a preselected value resulting in predictable fiber coatings of a preselected thickness, crystallinity and chemistry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.