Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
US6344366B1 · kind B1 · utility
30Cited by
8References
19Claims
0Family size
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Inventor
Key dates
| Filing date | Sep 15, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Sep 15, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.