Miniaturized photoacoustic spectrometer
US6344647B1 · kind B1 · utility
22Cited by
4References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | May 17, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A miniaturized photoacoustic spectrometer made from a series of stacked substrates. An infrared source is formed in a first substrate. A filter is formed in a second substrate. A micro-trough is machined in a third substrate and a microphone is formed in a fourth substrate. A fifth substrate has a metallic deposit for reflecting light emitted by the infrared source. Resin sealing is provided between the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.