Surface measuring apparatus having relative displacement between a probe and its carriage
US6344656B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2000 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Jul 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A metrological instrument for measuring surface characteristics such as surface form of a component (300). The instrument includes a slideway (32) to cause relative movement between a surface sensing probe (84) and the component which allows the probe to traverse a surface of the component. A probe carriage (80) supports the probe to allow the probe to move as a body in a measurement direction relative to the carriage so as to follow a surface being sensed. An optical sensor (82) provides a signal indicative of the displacement of the probe relative to the probe carriage. A controller (83) acts in response to a signal from the optical sensor, to move the probe carriage so as to maintain the probe in an operational range. A further sensor (11) measures measurement of displacement of the probe in the measurement direction as it follows a surface during use of the instrument.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.