Fluid flow meter
US6345540B1 · kind B1 · utility
0Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 1999 |
| Grant date | Feb 12, 2002 |
| Priority date | — |
| Expiry date | May 12, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P5/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fluid flow meter has a semi-conducting substrate and a number of integral flexible tines orientated across an aperture in the substrate to deflect in the direction of the fluid flow by an amount dependent on that fluid flow. Piezo-resistive regions are included on the respective tines to provide them with electrical characteristics which vary dependent on the degree of deflection. A monitor, operably coupled to the regions of the tines, is provided to monitor the changes in their electrical characteristics and to calculate the flow therefrom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.