Carbon nanotube structures made using catalyst islands
US6346189B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 1998 |
| Grant date | Feb 12, 2002 |
| Priority date | — |
| Expiry date | Aug 14, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2975
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention includes several nanotube structures which can be made using catalyst islands disposed on a substrate (e.g. silicon, alumina, or quartz) or on the free end of an atomic force microscope cantilever. The catalyst islands are capable of catalyzing the growth of carbon nanotubes from carbon containing gases (e.g. methane). The present invention includes an island of catalyst material (such as Fe2O3) disposed on the substrate with a carbon nanotube extending from the island. Also included in the present invention is a pair of islands with a nanotube extending between the islands, electrically connecting them. Conductive metal lines connected to the islands (which may be a few microns on a side) allows for external circuitry to connect to the nanotube. Such a structure can be used in many different electronic and microelectromechanical devices. For example, a nanotube connected between two islands can function as a resonator if the substrate beneath the nanotube is etched away. Also, the present invention includes a catalyst particle disposed on the free end of an AFM cantilever and having a nanotube extending from the particle. The nanotube can be used as the scann…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.