Resistive bolometer sensor
US6346703B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2000 |
| Grant date | Feb 12, 2002 |
| Priority date | — |
| Expiry date | Mar 24, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resistive bolometer sensor is provided, in which a fixed resistor is replaced with a sensor resistor to reduce an error of an output value due to temperature variation, thereby improving sensitivity. The resistive bolometer sensor comprises: a sensing unit for sensing an infrared ray, the sensing unit including a sensor resistor and three compensation sensor resistors; a supporting unit for supporting the sensing unit, for controlling heat transfer to the outside; and a silicon rim supporting the overall elements of the sensor, for reflecting an external temperature, wherein the sensor resistor senses a resistance value by incident infrared ray, and the three compensation sensor resistors have a bridge structure with the sensor resistor and senses a environmental temperature to compensate a resistance value that varies in accordance with temperature variation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.