Resist bowl cleaning
US6348100B1 · kind B1 · utility
2Cited by
8References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 1999 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Jul 1, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A method of processing a substrate. A polymer is applied to a substrate. A portion of the polymer is not retained on the substrate and is collected by a catch basin. The catch basin is cleaned by exposing the catch basin and collected polymer to a material comprising acetic acid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.