Method for producing a ceramic diaphragm structure
US6348115B1 · kind B1 · utility
5Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1999 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Aug 24, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/68
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for forming a ceramic diaphragm structure includes providing a laminate of a ceramic green substrate having at least one window and a plurality of layers, and a thin ceramic green sheet superimposed on the ceramic green substrate to cover the at least one window. The laminate is fired so that the ceramic green sheet provides a diaphragm portion protruding in a direction away from the at least one window, and the fired laminate is subjected to a second firing step under load.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.