Methods for and products of modification and metallization of oxidizable surfaces, including diamond surfaces, by plasma oxidation
US6348240B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 1992 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Aug 21, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/32
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention concerns a process for modifying oxidizable surfaces, including diamond surfaces, including methods for metallizing these surfaces, where these methods include oxidation of these surfaces. The present invention also relates to the products of these methods.In this process, a surface is first plasma oxidized, usually under an RF O2 plasma. Chemical functional groups are then attached to the surface. If the surface is to be metallized, the chemical functional groups are selected to be catalyzable, the surface is then catalyzed for electroless metallization, and the surface is finally treated with an electroless plating solution to metallize the surface.If modified surface is to be patterned, the modified surface is exposed through a mask to pattern the surface after the attachment of the chemical functional groups.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.