Manufacturing method of photovoltaic device
US6348362B1 · kind B1 · utility
0Cited by
6References
11Claims
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Key dates
| Filing date | Nov 28, 2000 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Nov 28, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/94
Abstract
A manufacturing method of a photovoltaic device comprising a plurality of unit cells including a first electrode of zinc oxide, a photovoltaic conversion layer, and a second electrode on a surface of a substrate includes a process for forming a zinc oxide film on the surface of the substrate, a process for eliminating a predetermined part of the zinc oxide film by laser beam irradiation and dividing the zinc oxide film into a plurality of the first electrodes, and a process for etching the surface of the substrate including the plurality of the first electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.