Microscopic capacitance measurement system and probing system
US6348809B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 10, 1999 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Aug 10, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/2605
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a probing and measurement system for measuring a capacitance value of a capacitance to be measured, by removing any influence made by a parasitic capacitance and a fluctuation thereof within a shield box 11. The probing and measurement system comprises a prober 1, a signal line having one end to be in contact with a sample to be measured, a shield line surrounding the signal line, and a capacitance measurement circuit 6. The capacitance measurement circuit 6 comprises an operational amplifier 61 having an inverting input terminal connected to the other end of the signal line and a non-inverting input terminal connected to the shield line, wherein an imaginary short state exists between the inverting input terminal and the non-inverting input terminal, and wherein a signal having a value corresponding to an electrostatic capacitance of the sample to be measured is outputted when an AC signal is applied to the non-inverting input terminal. Conductive portions of the shield box 11, conductive portions of a stand 13, a surface of the stand which contacts with the sample to be measured, and the shield line are placed at the same electric potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.